Patents/Inventors

Duk Hyun Son

Cheonan-siKR12 patents

9 Patents

US125936532026
Transfer Unit and Substrate Treatment Apparatus Including the Same
Semes Co., Ltd.
0 cites
US125506692026
Substrate Transfer Module and Semiconductor Manufacturing Equipment
SEMES CO., Ltd.
0 cites
US125123052025
Plasma Processing Apparatus and Plasma Control Method Using Magnetic Field
SEMES CO., Ltd.
0 cites
US124008862025
Apparatus for Transporting Substrate and System for Treating Substrate with the Apparatus
SEMES CO., Ltd
0 cites
US123879502025
Transfer Assembly and Apparatus for Treating a Substrate with the Transfer Assembly
SEMES CO., Ltd.
0 cites
US123409882025
Ring Carrier and Substrate Treating System
SEMES CO., Ltd.
0 cites
US121989092025
Apparatus for Treating Substrate
SEMES CO., Ltd.
0 cites
US116316062023
Substrate Storage Apparatus and Apparatus for Processing Substrate Using the Same
Semes Co., Ltd.
0 cites
US115691032023
Apparatus for Transporting Substrate and System for Treating Substrate with the Apparatus
Semes Co., Ltd.
0 cites