Patents/Inventors

Duan-fu Stephen Hsu

Fremont, CAUS15 patents

13 Patents

US125108282025
Method for Controlling a Manufacturing Process and Associated Apparatuses
ASML Netherlands B.V.
0 cites
US123395832025
Optimization Using a Non-uniform Illumination Intensity Profile
ASML NETHERLANDS B.V.
0 cites
US122226562025
Method for Determining Aberration Sensitivity of Patterns
ASML NETHERLANDS B.V.
0 cites
US122102912025
Aberration Impact Systems, Models, and Manufacturing Processes
ASML NETHERLANDS B.V.
0 cites
US120929632024
Method of Determining Characteristic of Patterning Process Based on Defect for Reducing Hotspot
ASML NETHERLANDS B.V.
0 cites
US119773342024
Wavefront Optimization for Tuning Scanner Based on Performance Matching
ASML NETHERLANDS B.V.
0 cites
US118927762024
Imaging via Zeroth Order Suppression
ASML NETHERLANDS B.V.
0 cites
US118861242024
Flows of Optimization for Patterning Processes
ASML NETHERLANDS B.V.
0 cites
US118468892023
Method and Apparatus for Diffraction Pattern Guided Source Mask Optimization
ASML NETHERLANDS B.V.
0 cites
US118158082023
Method for High Numerical Aperture Thru-slit Source Mask Optimization
ASML NETHERLANDS B.V.
0 cites
US117477392023
Method and Apparatus for Imaging Using Narrowed Bandwidth
CYMER, LLC
0 cites
US116818492023
Method for Optimizing a Patterning Device Pattern
ASML NETHERLANDS B.V.
0 cites
US115861142023
Wavefront Optimization for Tuning Scanner Based on Performance Matching
ASML Netherlands B.V.
0 cites