Patents/Inventors

Douglas A. Buchberger, Jr.

Livermore, CAUS11 patents

9 Patents

US125663812026
Chamber and Methods of Cooling a Substrate After Baking
Applied Materials, Inc.
0 cites
US125557482026
Symmetric Plasma Process Chamber
Applied Materials, Inc.
0 cites
US121818012024
Chamber and Methods of Treating a Substrate After Exposure to Radiation
Applied Materials, Inc.
0 cites
US119341032024
Apparatus for Post Exposure Bake of Photoresist
APPLIED MATERIALS, Inc.
0 cites
US118993662024
Method and Apparatus for Post Exposure Processing of Photoresist Wafers
Applied Materials, Inc.
0 cites
US118158162023
Apparatus for Post Exposure Bake of Photoresist
Applied Materials, Inc.
0 cites
US116315912023
Methods for Depositing Dielectric Material
APPLIED MATERIALS, Inc.
0 cites
US116095052023
Apparatus and Methods for Verification and Re-use of Process Fluids
Applied Materials, Inc.
0 cites
US115557302023
In-situ Method and Apparatus for Measuring Fluid Resistivity
APPLIED MATERIALS, Inc.
0 cites