3 Patents
- US123076512025Method of Detecting Measurement Error of SEM Equipment and Method of Aligning SEM Equipment
SEOUL NATIONAL UNIVERSITY R&DB FOUNDATION
0 cites - US122052672025Pattern Inspection Method Using Pattern Model
Seoul National University R&DB Foundation
0 cites - US117400732023Method for Measuring CD Using Scanning Electron Microscope
SEOUL NATIONAL UNIVERSITY R&DB FOUNDATION
0 cites