2 Patents
- US126047082026Atomic Layer Etch Systems for Selectively Etching with Halogen-based Compounds
Lam Research Corporation
0 cites - US119843302024Atomic Layer Etch and Deposition Processing Systems Including a Lens Circuit with a Tele-centric Lens, an Optical Beam Folding Assembly, or a Polygon Scanner
Lam Research Corporation
0 cites