Patents/Inventors

Dong Mok Lee

Chungcheongnam-doKR4 patents

3 Patents

US125123052025
Plasma Processing Apparatus and Plasma Control Method Using Magnetic Field
SEMES CO., Ltd.
0 cites
US122058022025
Substrate Processing Apparatus and Method of Fabricating Same
SEMES CO., Ltd.
0 cites
US117053572023
Substrate Processing System Including Electrostatic Chuck and Method for Manufacturing Electrostatic Chuck
Semes Co., Ltd.
0 cites