Dong-hyub Lee

2 Patents

• US123277092025

  Antennas, Circuits for Generating Plasma, Plasma Processing Apparatus, and Methods of Manufacturing Semiconductor Devices Using the Same

  Samsung Electronics Co., Ltd.

  0 cites
• US116762632023

  Extreme Ultraviolet (EUV) Collector Inspection Apparatus and Method

  SAMSUNG ELECTRONICS CO., Ltd.

  0 cites