Patents/Inventors

Dohyun Jung

Suwon-siKR8 patents

8 Patents

US126079442026
Extreme Ultraviolet Source Cleaning Apparatus, EUV Source Cleaning Method Using the Same, and Substrate Processing Method Including the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US125786612026
Apparatus for Cleaning an Extreme Ultraviolet Light Creation Chamber
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US124875322025
EUV Collector Inspection Apparatus and Inspection Method
Samsung Electronics Co., Ltd.
0 cites
US122986762025
Substrate Processing Apparatus
Samsung Electronics Co., Ltd.
0 cites
US122568812025
Drying Apparatus and Method of Controlling Same
LG Electronics Inc.
0 cites
US122326832025
Drying Apparatus and Method of Controlling Same
LG Electronics Inc.
0 cites
US122156942025
Flow Path Conversion Pump
LG Electronics Inc.
0 cites
US119397162024
Clothes Treating Apparatus
LG Electronics Inc.
0 cites