Dmitry Simakov

2 Patents

• US123724312025

  Method for Determining an Imaging Quality of an Optical System When Illuminated by Illumination Light Within a Pupil to Be Measured

  Carl Zeiss SMT GmbH

  0 cites
• US118993582024

  Method for Measuring Photomasks

  Carl Zeiss SMT GmbH

  0 cites