Patents/Inventors

Dmitry A. Dzilno

Sunnyvale, CAUS20 patents

21 Patents

US123946042025
Plasma Source with Floating Electrodes
Applied Materials, Inc.
0 cites
US123173782025
Multi-zone Heater Control for Wafer Processing Equipment
Applied Materials, Inc.
0 cites
US122886772025
Vertically Adjustable Plasma Source
Applied Materials, Inc.
0 cites
US122241562025
Microwave Plasma Source for Spatial Plasma Enhanced Atomic Layer Deposition (PE-ALD) Processing Tool
Applied Materials, Inc.
0 cites
US121989082025
Magnetically Coupled RF Filter for Substrate Processing Chambers
Applied Materials, Inc.
0 cites
US120947482024
Bipolar Esc with Balanced RF Impedance
Applied Materials, Inc.
0 cites
US120805842024
Real Time Bias Detection and Correction for Electrostatic Chuck
Applied Materials, Inc.
0 cites
US120573392024
Bipolar Electrostatic Chuck to Limit DC Discharge
Applied Materials, Inc.
0 cites
US120402102024
Multi-pressure Bipolar Electrostatic Chucking
Applied Materials, Inc.
0 cites
US119568832024
Methods and Apparatus for Controlling RF Parameters at Multiple Frequencies
APPLIED MATERIALS, Inc.
0 cites
US119231722024
Paired Dynamic Parallel Plate Capacitively Coupled Plasmas
APPLIED MATERIALS, Inc.
0 cites
US119012092024
High Temperature Bipolar Electrostatic Chuck
Applied Materials, Inc.
0 cites
US118238712023
Microwave Plasma Source for Spatial Plasma Enhanced Atomic Layer Deposition (PE-ALD) Processing Tool
Applied Materials, Inc.
0 cites
US117767932023
Plasma Source with Ceramic Electrode Plate
Applied Materials, Inc.
0 cites
US117768352023
Power Supply Signal Conditioning for an Electrostatic Chuck
Applied Materials, Inc.
0 cites
US117053122023
Vertically Adjustable Plasma Source
Applied Materials, Inc.
0 cites
US116315832023
RF Power Source Operation in Plasma Enhanced Processes
Applied Materials, Inc.
0 cites
US116268532023
RF Power Delivery Architecture with Switchable Match and Frequency Tuning
Applied Materials, Inc.
0 cites
US115944402023
Real Time Bias Detection and Correction for Electrostatic Chuck
Applied Materials, Inc.
0 cites
US115878172023
High Temperature Bipolar Electrostatic Chuck
Applied Materials, Inc.
0 cites
US115708792023
Methods and Apparatus for Controlling RF Parameters at Multiple Frequencies
APPLIED MATERIALS, Inc.
0 cites