Patents/Inventors

Dirk Heinrich Ehm

BeckingenDE1 patent

2 Patents

US123325762025
Method for Maintaining a Projection Exposure Apparatus, Service Module and Arrangement for Semiconductor Lithography
Carl Zeiss SMT GmbH
0 cites
US122875882025
Method for Operating an EUV Lithography Apparatus, and EUV Lithography Apparatus
CARL ZEISS SMT GmbH
0 cites