Dinkesh Huderi Somanna

3 Patents

• US125975872026

  Process Chambers Having Multiple Cooling Plates

  Applied Materials Inc.

  0 cites
• US121835592024

  Apparatus for Temperature Control in a Substrate Processing Chamber

  APPLIED MATERIALS, Inc.

  0 cites
• US119819892024

  Automated Temperature Controlled Substrate Support

  APPLIED MATERIALS, Inc.

  0 cites