Dietmar Uwe Herbert Trees

4 Patents

• US123523712025

  Fluid Control Device and Method for Fluid Control in an Extreme Ultraviolet Light Source

  ASML Netherlands B.V.

  0 cites
• US122950882025

  Hybrid Droplet Generator for Extreme Ultraviolet Light Sources in Lithographic Radiation Systems

  ASML Netherlands B.V.

  0 cites
• US122220502025

  Robust Fluid Coupling Apparatus

  ASML Netherlands B.V.

  0 cites
• US121394362024

  Droplet Generator Nozzle

  ASML Netherlands B.V.

  0 cites