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Inventors
Diego Martinez Negrete Gasque
Delft
NL
4 patents
3 Patents
US12562334
2026
Multi-beam Charged Particle Column
ASML Netherlands B.V.
0 cites
US12555740
2026
Charged Particle System, Aperture Array, Charged Particle Tool and Method of Operating a Charged Particle System
ASML Netherlands B.V.
0 cites
US12243714
2025
Lens Designs
ASML Netherlands B.V.
0 cites