Derrick A. Shaughnessy

5 Patents

• US125717242026

  Single Wafer Orientation Tool-induced Shift Cleaning

  KLA Corporation

  0 cites
• US125105902025

  Metrology in the Presence of CMOS Under Array (cua) Structures Utilizing an Effective Medium Model with Physical Modeling

  KLA Corporation

  0 cites
• US123803672025

  Metrology in the Presence of CMOS Under Array (cua) Structures Utilizing Machine Learning and Physical Modeling

  KLA Corporation

  0 cites
• US123728822025

  Metrology in the Presence of CMOS Under Array (CUA) Structures Utilizing an Effective Medium Model with Classification of CUA Structures

  KLA Corporation

  0 cites
• US119138742024

  Optical Metrology Tool Equipped with Modulated Illumination Sources

  KLA Corporation

  0 cites