Patents/Inventors

Dennis Herman Caspar Van Banning

BestNL3 patents

4 Patents

US123548912025
Particle Beam Inspection Apparatus
ASML Netherlands B.V.
0 cites
US120516072024
Substrate Positioning Device with Remote Temperature Sensor
ASML NETHERLANDS B.V.
0 cites
US119423402024
Particle Beam Inspection Apparatus
ASML Netherlands B.V.
0 cites
US117640272023
Systems and Methods of Cooling Objective Lens of a Charged-particle Beam System
ASML Netherlands B.V.
0 cites