Denis M. Koosau

4 Patents

• US120947522024

  Wafer Edge Ring Lifting Solution

  Applied Materials, Inc.

  0 cites
• US120092362024

  Sensors and System for In-situ Edge Ring Erosion Monitor

  Applied Materials, Inc.

  0 cites
• US119357732024

  Calibration Jig and Calibration Method

  Applied Materials, Inc.

  0 cites
• US116685532023

  Apparatus and Method for Controlling Edge Ring Variation

  Applied Materials Inc.

  0 cites