24 Patents
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- US125884692026Bipolar Electrostatic Chuck Electrode with Self-induced DC Voltage
Applied Materials, Inc.
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- US123811062025Systems and Methods of Seasoning Electrostatic Chucks with Dielectric Seasoning Films
Applied Materials, Inc.
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- US116462162023Systems and Methods of Seasoning Electrostatic Chucks with Dielectric Seasoning Films
Applied Materials, Inc.
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