Patents/Inventors

David Y. Wang

Santa Clara, CAUS5 patents

6 Patents

US124610412025
Measurement of Thick Films and High Aspect Ratio Structures
KLA Corporation
0 cites
US124493522025
Optics for Measurement of Thick Films and High Aspect Ratio Structures
KLA Corporation
0 cites
US121640932024
Reflective Compact Lens for Magneto-optic Kerr Effect Metrology System
0 cites
US120133552024
Methods and Systems for Compact, Small Spot Size Soft X-ray Scatterometry
KLA Corporation
0 cites
US119138742024
Optical Metrology Tool Equipped with Modulated Illumination Sources
KLA Corporation
0 cites
US119067702024
Monolithic Optical Retarder
KLA Corporal
0 cites