Patents/Inventors

David Sporleder

Billerica, MAUS4 patents

5 Patents

US124976872025
Ion Implantation System and Method for Implanting Aluminum Using Non-fluorine-containing Halide Species or Molecules
Axcelis Technologies, Inc.
0 cites
US121547632024
Hydraulic Feed System for an Ion Source
Axcelis Technologies, Inc.
0 cites
US117567722023
System and Method for Extending a Lifetime of an Ion Source for Molecular Carbon Implants
Axcelis Technologies, Inc.
0 cites
US117281402023
Hydraulic Feed System for an Ion Source
Axcelis Technologies, Inc.
0 cites
US115453302023
Ion Source with Multiple Bias Electrodes
Axcelis Technologies, Inc.
0 cites