Patents/Inventors

David Mui

Fremont, CAUS2 patents

3 Patents

US124671472025
Vapor Cleaning of Substrate Surfaces
LAM RESEARCH CORPORATION
0 cites
US121989452025
Vapor Delivery Head for Preventing Stiction of High Aspect Ratio Structures And/or Repairing High Aspect Ratio Structures
LAM RESEARCH AG
0 cites
US118238922023
Gas Mixture Including Hydrogen Fluoride, Alcohol and an Additive for Preventing Stiction of And/or Repairing High Aspect Ratio Structures
Lam Research AG
0 cites