12 Patents
- US125867572026Modular Recipe Controlled Calibration (MRCC) Apparatus Used to Balance Plasma in Multiple Station System
Lam Research Corporation
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- US122179392025RF Tuning Systems Including Tuning Circuits Having Impedances for Setting and Adjusting Parameters of Electrodes in Electrostatic Chucks
Lam Research Corporation
0 cites - US119945422024RF Signal Parameter Measurement in an Integrated Circuit Fabrication Chamber
Lam Research Corporation
0 cites - 0 cites
- US118374412023Depositing a Carbon Hardmask by High Power Pulsed Low Frequency RF
Lam Research Corporation
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- US117882922023Dual Strip Protective Edge Film for Roofing Membrane Seams
CARLISLE CONSTRUCTION MATERIALS, LLC
0 cites - US115943972023Modular Recipe Controlled Calibration (MRCC) Apparatus Used to Balance Plasma in Multiple Station System
Lam Research Corporation
0 cites - 0 cites