Patents/Inventors

David Frans Simon Deckers

TurnhoutBE3 patents

4 Patents

US123668092025
Methods and Apparatus for Controlling a Lithographic Process
ASML NETHERLANDS B.V.
0 cites
US117823492023
Methods of Determining Corrections for a Patterning Process, Device Manufacturing Method, Control System for a Lithographic Apparatus and Lithographic Apparatus
ASML NETHERLANDS B.V.
0 cites
US117549312023
Method for Determining Corrections for Lithographic Apparatus
ASML NETHERLANDS B.V.
0 cites
US115927532023
Methods of Determining Corrections for a Patterning Process, Device Manufacturing Method, Control System for a Lithographic Apparatus and Lithographic Apparatus
ASML Netherlands B.V.
0 cites