9 Patents
- US125640122026Ultrathin Conformal Coatings for Electrostatic Dissipation in Semiconductor Process Tools
Applied Materials, Inc.
0 cites - 0 cites
- US123519102025Hafnium Aluminum Oxide Coatings Deposited by Atomic Layer Deposition
Applied Materials, Inc.
0 cites - US121042462024Atomic Layer Deposition of Protective Coatings for Semiconductor Process Chamber Components
Applied Materials, Inc.
0 cites - US120026572024Multi-layer Plasma Resistant Coating by Atomic Layer Deposition
Applied Materials, Inc.
0 cites - US120043372024Ultrathin Conformal Coatings for Electrostatic Dissipation in Semiconductor Process Tools
Applied Materials, Inc.
0 cites - US116675772023Y 2 O 3 —zro 2 Erosion Resistant Material for Chamber Components in Plasma Environments
Applied Materials, Inc.
0 cites - 0 cites
- US115470302023Ultrathin Conformal Coatings for Electrostatic Dissipation in Semiconductor Process Tools
APPLIED MATERIALS, Inc.
0 cites