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Inventors
David Bessems
Eindhoven
NL
2 patents
3 Patents
US12197140
2025
Substrate Table, Immersion Lithographic Apparatus and Device Manufacturing Method
ASML NETHERLANDS B.V.
0 cites
US11963285
2024
Target Material Control in an EUV Light Source
ASML Netherlands B.V.
0 cites
US11774012
2023
Apparatus for High Pressure Connection
ASML Netherlands B.V.
0 cites