Patents/Inventors

Darrell Ehrlich

San Jose, CAUS8 patents

8 Patents

US125623502026
Moveable Edge Rings for Plasma Processing Systems
LAM RESEARCH CORPORATION
0 cites
US125000682025
Edge Rings Providing Kinematic Coupling and Corresponding Substrate Processing Systems
Lam Research Corporation
0 cites
US123811052025
Coolant Channel with Internal Fins for Substrate Processing Pedestals
LAM RESEARCH CORPORATION
0 cites
US123409892025
Electrostatic Edge Ring Mounting System for Substrate Processing
Lam Research Corporation
0 cites
US121318902024
Chuck for Plasma Processing Chamber
Lam Research Corporation
0 cites
US119675172024
Electrostatic Chuck with Ceramic Monolithic Body
Lam Research Corporation
0 cites
US117987892023
Replaceable And/or Collapsible Edge Ring Assemblies for Plasma Sheath Tuning Incorporating Edge Ring Positioning and Centering Features
Lam Research Corporation
0 cites
US115944002023
Multi Zone Gas Injection Upper Electrode System
Lam Research Corporation
0 cites