Patents/Inventors

Daniel P. Spence

Carlsbad, CAUS2 patents

3 Patents

US124417472025
Silicon Compounds and Methods for Depositing Films Using Same
Versum Materials US, LLC
0 cites
US117354132023
Precursors and Flowable CVD Methods for Making Low-k Films to Fill Surface Features
Versum Materials US, LLC
0 cites
US115916922023
Organoamino-polysiloxanes for Deposition of Silicon-containing Films
Versum Materials US, LLC
0 cites