Patents/Inventors

Daniel Jozef Maria Direcks

SimpelveldNL2 patents

3 Patents

US124114242025
Temperature Conditioning System, a Lithographic Apparatus and a Method of Temperature Conditioning an Object
ASML NETHERLANDS B.V.
0 cites
US119829472024
Contamination Trap
ASML NETHERLAND B.V.
0 cites
US115560672023
Contamination Trap
ASML Netherlands B.V.
0 cites