Patents/Inventors

Daniel J. Fulford

Ballston Lake, NYUS8 patents

8 Patents

US125299652026
Method for Selective Exposure of Wafer to Corrective Irradiation at a Per-die Level
Tokyo Electron Limited
0 cites
US125059982025
Method for Chuck Compensation via Wafer Shape Control
Tokyo Electron Limited
0 cites
US124555112025
In-situ Lithography Pattern Enhancement with Localized Stress Treatment Tuning Using Heat Zones
Tokyo Electron Limited
0 cites
US122042532025
In-situ Lithography Pattern Enhancement with Localized Stress Treatment Tuning Using Heat Zones
Tokyo Electron Limited
0 cites
US120011472024
Precision Multi-axis Photolithography Alignment Correction Using Stressor Film
Tokyo Electron Limited
0 cites
US119948072024
In-situ Lithography Pattern Enhancement with Localized Stress Treatment Tuning Using Heat Zones
Tokyo Electron Limited
0 cites
US117215512023
Localized Stress Regions for Three-dimension Chiplet Formation
Tokyo Electron Limited
0 cites
US116886422023
Localized Stress Regions for Three-dimension Chiplet Formation
Tokyo Electron Limited
0 cites