Patents/Inventors

Daniel Fulford

Albany, NYUS21 patents

13 Patents

US125999222026
System and Method for Liquid Dispense and Coverage Control
Tokyo Electron Limited
0 cites
US125818982026
Device and Method for Determining Wafer Bow
Tokyo Electron Limited
0 cites
US124359642025
Contactless Capacitive Measurement Tool with Improved Throughput and Accuracy
Tokyo Electron Limited
0 cites
US123811182025
3D Multiple Location Compressing Bonded Arm for Advanced Integration
Tokyo Electron Limited
0 cites
US123410532025
System for Backside Deposition of a Substrate
Tokyo Electron Limited
0 cites
US122769222025
Backside Deposition Tuning of Stress to Control Wafer Bow in Semiconductor Processing
Tokyo Electron Limited
0 cites
US119903342024
Method for Tuning Stress Transitions of Films on a Substrate
Tokyo Electron Limited
0 cites
US119087282024
System for Backside Deposition of a Substrate
Tokyo Electron Limited
0 cites
US118838372024
System and Method for Liquid Dispense and Coverage Control
Tokyo Electron Limited
0 cites
US118548062023
Method for Pattern Reduction Using a Staircase Spacer
Tokyo Electron Limited
0 cites
US118416172023
Method of Forming a Narrow Trench
Tokyo Electron Limited
0 cites
US117768122023
Method for Pattern Reduction Using a Staircase Spacer
Tokyo Electron Limited
0 cites
US116565502023
Controlling Semiconductor Film Thickness
Tokyo Electron Limited
0 cites