Patents/Inventors

Dan Marohl

San Jose, CAUS11 patents

4 Patents

US126032572026
Carrier Ring for Floating TCP Chamber Gas Plate
LAM RESEARCH CORPORATION
0 cites
US123946032025
Multizone Gas Distribution Plate for Trench Profile Optimization
LAM RESEARCH CORPORATION
0 cites
US121868872025
Collaborative Robot System on a Mobile Cart with a Chamber Docking System
Lam Research Corporation
0 cites
US120875572024
Substrate Processing System Including Coil with RF Powered Faraday Shield
LAM RESEARCH CORPORATION
0 cites