3 Patents
- US117809462023Alternating Copolymer, Method of Producing Alternating Copolymer, Method of Producing Polymeric Compound, and Method of Forming Resist Pattern
TOKYO OHKA KOGYO CO., Ltd.
0 cites - US117477242023Organically Modified Metal Oxide Nanoparticles, Organically Modified Metal Oxide Nanoparticles-containing Solution, Organically Modified Metal Oxide Nanoparticles-containing Resist Composition, and Resist Pattern Forming Method
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
0 cites - US115604442023Method of Producing Block Copolymer Capable of Creating Specific Structure Pattern
TOKYO INSTITUTE OF TECHNOLOGY
0 cites