Patents/Inventors

Dai Kitagawa

MiyagiJP3 patents

5 Patents

US124630212025
Substrate Processing Apparatus and Maintenance Method for Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US117568062023
Heater Power Feeding Mechanism
TOKYO ELECTRON LIMITED
0 cites
US117568072023
Power Feeding Mechanism and Method for Controlling Temperature of a Stage
Tokyo Electron Limited
0 cites
US117439732023
Placing Table and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US117053022023
Substrate Support and Plasma Processing Apparatus
Tokyo Electron Limited
0 cites