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Inventors
Daeyoun Kim
Daejeon
KR
2 patents
3 Patents
US12406873
2025
Lift Pin Assembly
ASM IP Holding B.V.
0 cites
USD0990441
2023
Gas Flow Control Plate
ASM IP Holding B.V.
0 cites
US11664199
2023
Substrate Processing Apparatus and Substrate Processing Method
ASM IP Holding B.V.
0 cites