Patents/Inventors

Da Song

Fremont, CAUS10 patents

5 Patents

US126222102026
Metrology Integrated with Vacuum Processing
Tokyo Electron Limited
0 cites
US123621582025
Method for OES Data Collection and Endpoint Detection
Tokyo Electron Limited
0 cites
US123547582025
Control System and Method for Heat Supply Apparatus of Nuclear Power Plant
STATE NUCLEAR ELECTRIC POWER PLANNING DESIGN & RESEARCH INSTITUTE CO., Ltd
0 cites
US123060442025
Optical Emission Spectroscopy for Advanced Process Characterization
Tokyo Electron Limited
0 cites
US121583742024
Time-resolved OES Data Collection
Tokyo Electron Limited
0 cites