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Da He
Sunnyvale, CA
US
4 patents
5 Patents
US12406884
2025
Self Field-suppression CVD Tungsten (W) Fill on PVD W Liner
APPLIED MATERIALS, Inc.
0 cites
US12191200
2025
Methods for Minimizing Feature-to-feature Gap Fill Height Variations
APPLIED MATERIALS, Inc.
0 cites
US11967525
2024
Selective Tungsten Deposition at Low Temperatures
Applied Materials, Inc.
0 cites
US11955381
2024
Low-temperature Plasma Pre-clean for Selective Gap Fill
Applied Materials, Inc.
0 cites
US11641748
2023
Pretreatment Method of Selector Device
HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY
0 cites