6 Patents
- US125639802026Selective Deposition and Cross-linking of Polymeric Dielectric Material
International Business Machines Corporation
0 cites - US124761442025Etch Back and Film Profile Shaping of Selective Dielectric Deposition
International Business Machines Corporation
0 cites - US122725452025Embedded Metal Contamination Removal from BEOL Wafers
International Business Machines Corporation
0 cites - US122666072025Bottom Barrier Free Interconnects Without Voids
International Business Machines Corporation
0 cites - US118043782023Surface Conversion in Chemical Mechanical Polishing
International Business Machines Corporation
0 cites - US116370362023Planarization Stop Region for Use with Low Pattern Density Interconnects
International Business Machines Corporation
0 cites