9 Patents
- US125598622026Metalorganic Chemical Vapor Phase Deposition Apparatus Having Bubbler with First Supply Section Leading to Reactor, First, Second and Third Mass Flow Controller and Pressure Sensor
Azur Space Solar Power GmbH
0 cites - US124446042025Vapor Phase Epitaxy Method0 cites
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- US116294322023Metalorganic Chemical Vapor Phase Deposition Apparatus Having Bubbler with First Supply Section Leading to Reactor, First, Second and Third Mass Flow Controller and Pressure Sensor
AZUR SPACE Solar Power GmbH
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