Patents/Inventors

Chunming Zhou

Fremont, CAUS5 patents

6 Patents

US121911982025
Low Resistivity Tungsten Film and Method of Manufacture
Applied Materials, Inc.
0 cites
US121762052024
Method and Chamber for Backside Physical Vapor Deposition
Applied Materials, Inc.
0 cites
US121424782024
Method and Chamber for Backside Physical Vapor Deposition
Applied Materials, Inc.
0 cites
US120947732024
Methods for Low Resistivity and Stress Tungsten Gap Fill
APPLIED MATERIALS, Inc.
0 cites
US117988452023
Methods and Apparatus for Low Resistivity and Stress Tungsten Gap Fill
APPLIED MATERIALS, Inc.
0 cites
US115726182023
Method and Chamber for Backside Physical Vapor Deposition
APPLIED MATERIALS, Inc.
0 cites