Patents/Inventors

Chungjong Lee

TokyoJP2 patents

3 Patents

US124008882025
Data Fusion of Multiple Sensors
Tokyo Electron Limited
0 cites
US123004772025
Autonomous Operation of Plasma Processing Tool
Tokyo Electron Limited
0 cites
US116690792023
Tool Health Monitoring and Classifications with Virtual Metrology and Incoming Wafer Monitoring Enhancements
Tokyo Electron Limited
0 cites