Patents/Inventors

Chun-yen Chang

HsinchuTW7 patents

8 Patents

US124826542025
System and Method for Multiple Step Directional Patterning
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US124761502025
Critical Dimension Uniformity (CDU) Control Method and Semiconductor Substrate Processing System
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US124371252025
Computer Aided Design System and Method for Educational Table Games
NATIONAL TAIWAN NORMAL UNIVERSITY
0 cites
US123548732025
System and Method for Multiple Step Directional Patterning
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US123476812025
Method of Forming a Semiconductor Device
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US120946912024
Etch Apparatus for Compensating Shifted Overlayers
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US120273682024
Method for Fabricating Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US117768102023
Method of Forming a Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites