Chun Yan

2 Patents

• US116495592023

  Method of Utilizing a Degassing Chamber to Reduce Arsenic Outgassing Following Deposition of Arsenic-containing Material on a Substrate

  Applied Materials, Inc.

  0 cites
• US116519772023

  Processing of Workpieces Using Fluorocarbon Plasma

  MATTSON TECHNOLOGY, Inc.

  0 cites