Patents/Inventors

Chun Wang Chan

Somerville, MAUS2 patents

3 Patents

US118374922023
Electrostatic Chuck Having a Gas Flow Feature, and Related Methods
ENTEGRIS, Inc.
0 cites
US117427812023
Electrostatic Chuck with Charge Dissipation Coating
ENTEGRIS, Inc.
0 cites
US116129722023
Electrostatic Chuck with Embossments That Comprise Diamond-like Carbon and Deposited Silicon-based Material, and Related Methods
ENTEGRIS, Inc.
0 cites