Patents/Inventors

Chun-lin Chang

ZhubeiTW11 patents

11 Patents

US122653362025
Semiconductor Processing Tool and Methods of Operation
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US121471662024
Mitigating Long-term Energy Decay of Laser Devices
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US121305552024
Method and Apparatus for Mitigating Contamination
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US121333192024
Apparatus and Method for Generating Extreme Ultraviolet Radiation
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US121144122024
Shock Wave Visualization for Extreme Ultraviolet Plasma Optimization
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US120091772024
Detection Using Semiconductor Detector
NATIONAL TSING HUA UNIVERSITY
0 cites
US119799712024
EUV Light Source and Apparatus for Lithography
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US118006262023
Shock Wave Visualization for Extreme Ultraviolet Plasma Optimization
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US117200352023
Mitigating Long-term Energy Decay of Laser Devices
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US116752722023
Method and Apparatus for Mitigating Contamination
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US116085662023
High Resistance Virtual Anode for Electroplating Cell
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
0 cites