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Inventors
Chul-kyu Yang
Daegu
KR
5 patents
5 Patents
US12541144
2026
Phase Shift Blankmask and Photomask for EUV Lithography
S&S TECH Co., Ltd.
0 cites
US11940725
2024
Phase Shift Blankmask and Photomask for EUV Lithography
S&S Tech Co., Ltd.
0 cites
US11927880
2024
Phase Shift Blankmask and Photomask for EUV Lithography
S&S TECH Co., Ltd.
0 cites
US11815801
2023
Reflective Type Blankmask and Photomask for EUV
S & S TECH CO., Ltd.
0 cites
US11579521
2023
Reflective Type Blankmask and Photomask for EUV
S&S TECH CO., Ltd.
0 cites