Patents/Inventors

Chui-ya Peng

HsinchuTW10 patents

10 Patents

US125074722025
Method of Making Polysilicon Structure Including Protective Layer
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US124826752025
Systems and Methods for In-situ Marangoni Cleaning
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US121989532025
System and Method for Operating the Same
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US120805672024
Systems and Methods for In-situ Marangoni Cleaning
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US120681792024
Systems and Methods for Shuttered Wafer Cleaning
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US119232102024
Systems and Methods for In-situ Marangoni Cleaning
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US118550862023
Polysilicon Structure Including Protective Layer
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US117354402023
Automated Wafer Cleaning
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US117215672023
System and Method for Operating the Same
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US116108252023
Method for Calibrating Temperature in Chemical Vapor Deposition
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites