Patents/Inventors

Chueh-chi Kuo

KaohsiungTW12 patents

13 Patents

US124203132025
Onsite Cleaning System and Method
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US123604642025
Lithography System and Method Thereof
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US123622182025
Substrate Holder and Methods of Use
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US122835122025
Semiconductor Processing Method and Apparatus
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US122102962025
Method of Cleaning Wafer Table of Photolithography System and Method of Manufacturing Integrated Circuit
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US121642352024
Semiconductor Processing Tool and Methods of Operation
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US120092462024
Substrate Holder and Methods of Use
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US119829442024
Method of Lithography Process and Transferring a Reticle
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US119538392024
Highly Efficient Automatic Particle Cleaner Method for EUV Systems
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US118307542023
Semiconductor Processing Method and Apparatus
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US118031292023
Semiconductor Processing Tool and Methods of Operation
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US117823502023
Lithography System and Method Thereof
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US117037632023
Method of Lithography Process Using Reticle Container with Discharging Device
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites