Patents/Inventors

Chuanwen Lin

JoetsuJP2 patents

3 Patents

US122042452025
Positive Resist Composition and Patterning Process
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites
US118468842023
Chemically Amplified Resist Composition and Patterning Process
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites
US118358592023
Resist Composition and Patterning Process
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites