Patents/Inventors

Chuang Wei

Chandler, AZUS2 patents

3 Patents

US123786652025
High Temperature Coatings for a Preclean and Etch Apparatus and Related Methods
ASM IP Holding B.V.
0 cites
US122725272025
Apparatus for Use with Hydrogen Radicals and Method of Using Same
ASM IP Holding B.V.
0 cites
US121129382024
Semiconductor Processing Preclean Methods and Apparatus
ASM IP Holding B.V.
0 cites