14 Patents
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- US125737532026Miniature Low Profile Harsh Environment Wireless Sensor with Tunable Antenna
Applied Materials, Inc.
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- US124826412025Printed Microwave Resonator for Measuring High Electron Density Plasmas
Applied Materials, Inc.
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- US122160152025MEMS Resonator Sensor Substrate for Plasma, Temperature, Stress, or Deposition Sensing
Applied Materials, Inc.
0 cites - US121761882024Optical Spectrum Sensor Wafer or Robot for Chamber Condition Monitoring
Applied Materials, Inc.
0 cites - 0 cites
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- US118741892024MEMS Resonator Sensor Substrate for Plasma, Temperature, Stress, or Deposition Sensing
Applied Materials, Inc.
0 cites - 0 cites